NCKU Math Colloquium / RCTS Seminar

DATE2015-03-12 16:10-17:00


SPEAKER黃旭霆 博士 (Ph. D. Hsu-Ting Huang) (台灣積體電路製造股份有限公司技術經理

TITLEComputational Lithography

ABSTRACT As semiconductor devices have been continuing to shrink, what designed on the circuit layout was no longer what printed on the wafer. Design for manufacturability (DFM) has become important since two decades ago. Computational lithography is a key enabler for DFM. General concepts and fundamental theories of computational lithography will be introduced. A glance of how this field is considered math intensive will be presented.